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D6F-@N2/-02L2
MEMS Flow Sensor
A Compact, High-accuracy Sensor
That Measures Low Flow Rates.
? High accuracy of ± 3% FS.
? Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the Safety Precautions on page 3.
Ordering Information
Output Voltage Characteristics
Model
D6F-01N2-000
D6F-02N2-000
D6F-05N2-000
D6F-02L2-000
Applicable fluid
City gas (13A)
Propane gas
Flow rate range
0 to 1 L/min
0 to 2 L/min.
0 to 5 L/min
0 to 2 L/min.
1
1
1
1
Minimum order
D6F-01N2-000
6.0
5.0
4.0
3.0
2.0
D6F-05N2-000
6.0
5.0
4.0
3.0
2.0
1.0
1.0
Connections
0.0
0.0
0.2
0.4 0.6
Flow rate (L/min)
0.8
1.0
0.0
0.0
1.0
2.0 3.0
Flow rate (L/min)
4.0
5.0
D6F-01N2-000
D6F-02N2-000
D6F-05N2-000
D6F-02L2-000
D6F-02L2-000
6.0
5.0
4.0
3.0
D6F-02N2-000
6.0
5.0
4.0
3.0
Pin No.
1: Vcc
2: Vout
2.0
1.0
2.0
1.0
Connector
3: GND
53398 (Made by Molex Japan)
0.0
0.0
0.4
0.8 1.2
Flow rate (L/min)
1.6
2.0
0.0
0.0
0.4
0.8 1.2
Flow rate (L/min)
1.6
2.0
Use the following connectors for connections to the D6F:
D6F-01N2-000
Housing 51021 (Made by Molex Japan)
Terminals 50079 (Made by Molex Japan)
Wires AWG28 to AWG26
Flow rate
L/min (normal)
Output voltage
V
0
1.00
± 0.12
0.2
1.90
± 0.12
0.4
2.81
± 0.12
0.6
3.64
± 0.12
0.8
4.37
± 0.12
1.0
5.00
± 0.12
D6F-02N2-000
1: Vcc
2: Vout
3: GND
Flow rate
L/min (normal)
0
0.4
0.8
1.2
1.6
2.0
Output voltage
V
1.00
± 0.12
2.19
± 0.12
3.18
± 0.12
3.96
± 0.12
4.55
± 0.12
5.00
± 0.12
D6F-05N2-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
± 0.12
1.0
2.91
± 0.12
2.0
3.92
± 0.12
3.0
4.47
± 0.12
4.0
4.79
± 0.12
5.0
5.00
± 0.12
D6F-02L2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
± 0.30
0.4
3.02
± 0.08
0.8
3.95
± 0.08
1.2
4.47
± 0.08
1.6
4.79
± 0.08
2.0
5.00
± 0.12
Measurement conditions: Power supply voltage of 12 ± 0.1 VDC, ambient tem-
perature of 25 ± 5 ° C, and ambient humidity of 35% to 75%.
1
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